1. Department of Powder Metallurgy, Central Iron & Steel Research Institute, Beijng 100081, China; 2. School ��of Material Science and Engineering, University of Science and Technology Beijing, Beijng 100083, China
Abstract��In this paper, a method for determining the thickness of diamond films has been developed by using grazing incidence X��ray technique. It is based on the variation of diffraction intensities from a crystal plane of the substrate at different grazing angles. A linear relation between the logarithm of the differction intensities from the substrate In��I����r and the grazing incidence angle function ��f��(��r��) was deduced, and the slope of the line is just the product of linear absorption coefficient of the thin film and its thickness. The thickness of a diamond thin film on cemented carbide WC��Co has been tested, and the repeatability of this method was investigated. Results show that there is a good linear correlation between In��I����r and ��f��(��r��), and that this method has high precision.
������;��ΰ��;�Ž�Զ;֣��. X���������䷨�ⶨ���ʯ��Ĥ��ȵ��о�[J]. �й������ڿ���, 2007, 25(4): 8-0.
FANG Jian��feng;TANG Wei��zhong;ZHANG Jin��yuan;ZHENG Yi. Study on Thickness Determination of Diamond Film by Grazing Incidence of X��ray Diffraction. Chinese Journal of Iron and Steel, 2007, 25(4): 8-0.
2007, Vol. 25 
