Abstract��The effect of Mo, Co, Nb ions implantation and the preparing methods of TiN films were studied. The tribological properties, wearing resistance and micro-hardness of TiN films before and after ions implantation were investigated with helps of SRV friction and wear tester and Talysurf 5P-120 instrument. Compared with the sample that TiN film was prepared by cathodic vacuum arc technique, the friction coefficient curve was different when TiN film was prepared by filtered cathodic vacuum arc technique, and its wearing resistance was better. The friction coefficients decreased after ions implantation. Under the load of 5N, the implanted elements and the implanted doses had large influences on the friction coefficients. The friction coefficients came close to 0.5 while the load raised to 30N. The wear-resisting property of these samples was improved significantly after Mo, Co, Nb ions implantation. And the best wearing resistance could be obtained after Nb implantation.
���ǽ�. ����ע��TiN��ĤĦ��ĥ�����ܵ��о�[J]. �й������ڿ���, 2010, 28(2): 20-20.
HU Zhi-Jie. The Wear and Tribological Properties of TiN Film after Ion Implantation. Chinese Journal of Iron and Steel, 2010, 28(2): 20-20.
2010, Vol. 28 
