Abstract��The surface morphology of CVD diamond film was observed by SEM and the texture was tested by XRD. It shows that different substrate temperatures induce different textures and surface morphology, the rise of substrate temperature results in the decrease of the growth velocity parameter ��, the most fast growth direction changes from <100> crystal direction to <011> and <111> crystal directions, which make the {011} and {111} textures strengthen. {100} textures does not form because of the high frequency twins, which induce the formation of {122} and {522} textures.
�ո�����: 2011-02-12
��������: 2011-08-01
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E-mail: zhuhx2004@126.com
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���ϲ,���˳���Ѧ�������η���,. �ĵ��¶ȶ�CVD���ʯ��Ĥ֯����Ӱ��[J]. �й������ڿ���, 2011, 29(4): 10-13.
ZHU Hong-xi1,2��GU Chao1��XUE Yong-dong3��REN Feng-zhang1,2. Effect of Substrate Temperature on Texture of CVD Diamond Film. Chinese Journal of Iron and Steel, 2011, 29(4): 10-13.
2011, Vol. 29 
