Abstract��Metal vapor vacuum arc (MEVVA) ion source was used to implant silicon ion into TiN coatings with varied dose. X-ray photoelectron sectroscopy (XPS) was employed to investigate the profile of the chemical composition. Nanoindenter tested the nanohardness of Si-implanted TiN coatings. The results revealed that the nanohardness of Si-ion implanted TiN coatings changed remarkably, 5��1016 ions/cm2 sample��s nanohardness peak increased to 39.85 from 27.18 GPa, with the implanted dose increased, nanohardness peak had the tendency to decrease, 1��1017 ions /cm2 sample��s hardness peak was 33.27 Gpa, but implantation layer was increased overall in a certain depth range. New microcrystalline phases Si3N4 were formed which have been proved by XPS, and the new nanophase has influence on mechanical property of coatings.
�ػ�����ұ���˱�. Si����ע���TiN��Ĥ���۽ṹ����ѧ���ܵ�Ӱ��[J]. �й������ڿ���, 2012, 30(3): 31-34.
QIN Hua��TAO Ye��DEN Bing. Effect on Microstructure and Mechanical Properties of Si-Ion Implanted TiN Coatings. Chinese Journal of Iron and Steel, 2012, 30(3): 31-34.
2012, Vol. 30 
