Abstract��The tellurium film was electroplated on the surface of nickel based alloy�� and then the samples were treated at different temperatures for different time in vacuum heat treatment condition. The penetration distribution of tellurium in Ni based alloy was investigated. SEM deployed with EDS and EPMA were used to test the experimental sample of a certain heat treatment condition�� which confirmed the unique advantages of EPMA in element with low content test. Finally�� the different characteristics of SEM deployed with EDS and WDS accessories and EPMA were summarized from various aspects�� and it was concluded that SEM had more prominent advantages in micro area observation�� and EPMA had irreplaceable features in micro area analysis.
��ͬ��. ɨ��羵�͵���̽��ԱȲ����������Ͻ��еķֲ�[J]. , 2018, 36(4): 21-24.
ZHAO Tong-xin. The comparison between SEM and EPMA in analysis of tellurium penetration into nickel alloy. , 2018, 36(4): 21-24.