Abstract: The principle of electron backscatter diffraction (EBSD) was reviewed. The practicability of testing and the pattern quality of EBSD was greatly decided by the quality of sample preparation. The advantages and disadvantages of various polishing methods, including mechanical polishing, chemical polishing, electrolytic polishing and ion beam treatment, were introduced. The factors affecting the quality of EBSD pattern were summarized, including the state of sample, the setting of electron microscope parameters and the setting of data acquisition software. This study provided a good guidance for beginners of EBSD technology.