A review of surface roughness measurements based on laser speckle method

Mei-qi Shao, Dong Xu, Si-yi Li, Xiao-gang Zuo, Chang-ke Chen, Gong-zhuang Peng, Jia-min Zhang, Xiao-chen Wang, Quan Yang

钢铁研究学报(英文版) ›› 2023, Vol. 30 ›› Issue (10) : 1897-1915.

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钢铁研究学报(英文版) ›› 2023, Vol. 30 ›› Issue (10) : 1897-1915. DOI: 10.1007/s42243-023-00930-8
综述

A review of surface roughness measurements based on laser speckle method

  • Mei-qi Shao1, Dong Xu1, Si-yi Li1, Xiao-gang Zuo2, Chang-ke Chen2, Gong-zhuang Peng1, Jia-min Zhang1, Xiao-chen Wang1, Quan Yang1
作者信息 +

A review of surface roughness measurements based on laser speckle method

  • Mei-qi Shao1, Dong Xu1, Si-yi Li1, Xiao-gang Zuo2, Chang-ke Chen2, Gong-zhuang Peng1, Jia-min Zhang1, Xiao-chen Wang1, Quan Yang1
Author information +
文章历史 +

摘要

Surface roughness is commonly used to characterize material microstructure during processing, and accurate measurement of surface roughness is the premise and foundation of machining. Therefore, online non-destructive measurement of surface roughness based on the laser speckle method has become a hot issue in recent research. The improvements in surface roughness measurements based on the laser speckle method are systematically reviewed. Theory of speckle formation is introduced. The statistical properties of the speckle patterns including first-order statistical properties and second-order statistical properties are directly related to surface roughness. Surface roughness measurements based on the laser speckle method are roughly divided into the speckle contrast method, speckle correlation method, and fractal method. The three methods are described in detail, and an extensive comparison among all the methods is presented. The recent progresses and application of surface roughness measurements are reviewed. Finally, surface roughness measurements based on the laser speckle method are prospected and summarized.

Abstract

Surface roughness is commonly used to characterize material microstructure during processing, and accurate measurement of surface roughness is the premise and foundation of machining. Therefore, online non-destructive measurement of surface roughness based on the laser speckle method has become a hot issue in recent research. The improvements in surface roughness measurements based on the laser speckle method are systematically reviewed. Theory of speckle formation is introduced. The statistical properties of the speckle patterns including first-order statistical properties and second-order statistical properties are directly related to surface roughness. Surface roughness measurements based on the laser speckle method are roughly divided into the speckle contrast method, speckle correlation method, and fractal method. The three methods are described in detail, and an extensive comparison among all the methods is presented. The recent progresses and application of surface roughness measurements are reviewed. Finally, surface roughness measurements based on the laser speckle method are prospected and summarized.

关键词

Statistical property / Laser speckle method / Non-destructive measurement / Surface roughness / Speckle pattern

Key words

Statistical property / Surface roughness / Non-destructive measurement / Speckle pattern / Laser speckle method

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Mei-qi Shao, Chang-ke Chen, Xiao-gang Zuo, . A review of surface roughness measurements based on laser speckle method[J]. 钢铁研究学报(英文版), 2023, 30(10): 1897-1915 https://doi.org/10.1007/s42243-023-00930-8
Mei-qi Shao, Chang-ke Chen, Xiao-gang Zuo, et al. A review of surface roughness measurements based on laser speckle method[J]. Journal of Iron and Steel Research International, 2023, 30(10): 1897-1915 https://doi.org/10.1007/s42243-023-00930-8

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