Influence of Processing Parameters on Hardness of Ti/TiN/Ti(C,N) Films Deposited by Unbalanced Magnetron Sputtering Technology

ZHANG Yichen;WU Yufeng;BA Dechun;MA Shengge

Journal of Iron and Steel Research ›› 2007, Vol. 19 ›› Issue (7) : 50-0.

Journal of Iron and Steel Research ›› 2007, Vol. 19 ›› Issue (7) : 50-0.
材料研究

Influence of Processing Parameters on Hardness of Ti/TiN/Ti(C,N) Films Deposited by Unbalanced Magnetron Sputtering Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 19(7): 50-0

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