Influence of bias voltage on structure, mechanical and corrosion properties of reactively sputtered nanocrystalline TiN films
Chun-lin He,*,Jin-lin Zhang,Guo-feng Ma,Zhao-fu Du,Jian-ming Wang,Dong-liang Zhao
Influence of bias voltage on structure, mechanical and corrosion properties of reactively sputtered nanocrystalline TiN films
Chun-lin He,*,Jin-lin Zhang,Guo-feng Ma,Zhao-fu Du,Jian-ming Wang,Dong-liang Zhao
.
2017, (12): 1223
-1230
.