Si离子注入对TiN薄膜的微观结构和力学性能的影响
秦华,陶冶,邓斌
Effect on Microstructure and Mechanical Properties of Si-Ion Implanted TiN Coatings
QIN Hua,TAO Ye,DEN Bing
中国钢铁期刊网 . 2012, (3): 31 -34 .