Nb+C离子注入磁过滤真空电弧镀TiAlN薄膜研究

刘红亮陶冶

Research on Nb+C Ion Implantation of TiAlN Film by Magnetic Filtering Vacuum Arc Deposition

Liu Hongliang Ye TAO

中国钢铁期刊网 . 2010, (2): 40 -40 .