The point analysis and surface scanning of light element F in inclusions of 5.5 mm cord steel wire rod was conducted using electron probe wavelength dispersive spectrometer (WDS) and equipped energy dispersive spectrometer (EDS). The results showed that the analysis results of WDS and EDS were consistent when the mass fraction of F element was higher than 5%, and both results were accurate and reliable. As the mass fraction of F element was between 1.5% and 5%, the analysis result of WDS was more accurate. When the mass fraction of F element was less than 1.5%, it could be considered as the systematic error of measuring equipment, and not used as the basis for judgment. By analyzing the typical elements of inclusions in steel, the source of inclusions could be determined and effectively controlled, so as to improve the quality level of tire cord steel.