SHEN Haihong, YANG Bo, XIA Peng, XU Lei, ZHOU Xiangqi, ZHANG Yubin
The microscopic analysis of materials is mainly carried out by means of destruction, such as optical microscope (OM), scanning electron microscope (SEM). Meanwhile, these destruction methods can only analyze the situation of surface, and the situation in whole volume cannot be reflected. How to select and process the analysis surface will directly affect the analysis results. The application of ordinary ultrasonic testing has a long history, but it cannot meet the requirements of material microscopic analysis when it is applied in millimeter defect detection of materials and parts. Scanning acoustic microscope (SAM) is a kind of C-scanning equipment with high precision scanning institutions and special software. The working frequency is high frequency ultrasound which is 100-1 000 times of ordinary ultrasound. The resolution of X/Y axis is up to 0.1 μm, and the resolution of Z axis is up to 5 μm, which can realize the analysis of micrometer-level defect (or tissue structure). It has multiple scanning modes including A, B, C, D, X, G, P and 3D, which can realize three-dimensional defect positioning, size measurement and area proportion analysis. The abnormal internal structure of materials can be accurately reflected, which can be used as the preliminary positioning and screening method for material analysis, or directly used in material analysis.