Analysis of inclusion control levels in ultra-high purity 316L stainless steel for semiconductor equipment

GAO Zhanjiang, WENG Jianyin, LUO Hui, LUO Xuewu, XU Xiangyu, FU Jianxun

China Metallurgy ›› 2025, Vol. 35 ›› Issue (2) : 23-35.

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China Metallurgy ›› 2025, Vol. 35 ›› Issue (2) : 23-35. DOI: 10.13228/j.boyuan.issn1006-9356.20240638
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Analysis of inclusion control levels in ultra-high purity 316L stainless steel for semiconductor equipment

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 35(2): 23-35 https://doi.org/10.13228/j.boyuan.issn1006-9356.20240638

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Started in 1991 (Monthly)
ISSN 1006-9356　CN 11-3729/TF
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Sponsor: The Chinese Society for Metals
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