Abstract：Aiming at the automated eddy current testing problem of surface defects in multi-diameter shaft parts for MOCVD equipment, a special automated eddy current testing system for multi-diameter shaft parts was developed. The self-adaption auxiliary device for the eddy current sensor was designed, and the research of automated eddy current testing equipment for reference samples and surface defects of multi-diameter shaft parts was conducted. The results showed that the combination of developed the eddy current sensor with auxiliary device and automatic detection system was able to eliminate the effect of lift-off effect on the eddy current signal. The rapid automatic eddy current testing for cracking defects, scoring defects and dent defects on surface of multi-diameter shaft parts for MOCVD equipment could be realized. Meanwhile, the detection efficiency could be significantly improved. The system was expected to be applied for the automated eddy current testing of complex multi-diameter shaft parts.
2023, Vol. 41 
