Analysis of inclusion control levels in ultra-high purity 316L stainless steel for semiconductor equipment
GAO Zhanjiang, WENG Jianyin, LUO Hui, LUO Xuewu, XU Xiangyu, FU Jianxun
China Metallurgy . 2025, (2): 23 -35 .  DOI: 10.13228/j.boyuan.issn1006-9356.20240638