Abstract:
At present, no national metrology and testing standards have been established for the application of white light interferometry in roughness detection. Through comparative experiments, this paper systematically evaluates the consistency and differences between this method and the stylus method, aiming to provide a reference for its standardization and engineering application. The experimental results show that when the stylus method and white light interferometry are used to detect the roughness parameter Ra, the repeatability and accuracy obtained by the two methods are within the allowable range, with the difference controlled within 5%, which is acceptable. However, for the Rz parameter, since light can detect sharp peaks and valleys during the detection process of white light interferometry, the measurement result is significantly larger than that of the stylus method, exceeding the uncertaintyrange.