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基于白光干涉法与触针法粗糙度检测比较研究

Based on white light interference versus needle roughness detection

  • 摘要: 目前白光干涉法用于粗糙度检测尚未建立国家计量与检测标准。本文通过对比实验,系统评估该方法与触针法的一致性及差异,旨在为其标准化与工程应用提供参考。实验结果表明:采用触针法和白光干涉法检测粗糙度Ra参数时,两种方法的重复性和准确性均在允许范围内,差异控制在5%以内,具备可接受性;而对于Rz参数,由于白光干涉法检测过程中光线可探测到表面尖峰与尖谷,测量结果明显大于触针法检测结果,超出了不确定度范围。

     

    Abstract: At present, no national metrology and testing standards have been established for the application of white light interferometry in roughness detection. Through comparative experiments, this paper systematically evaluates the consistency and differences between this method and the stylus method, aiming to provide a reference for its standardization and engineering application. The experimental results show that when the stylus method and white light interferometry are used to detect the roughness parameter Ra, the repeatability and accuracy obtained by the two methods are within the allowable range, with the difference controlled within 5%, which is acceptable. However, for the Rz parameter, since light can detect sharp peaks and valleys during the detection process of white light interferometry, the measurement result is significantly larger than that of the stylus method, exceeding the uncertaintyrange.

     

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