Abstract:
The Hall coefficient was an important parameter for testing semiconductor materials and devices. This article introduced the measurement principle of the semiconductor Hall coefficient, established a measurement device based on the direct current Hall method, and elaborated on the composition and working principle of the Hall coefficient measurement equipment. It summarised the sources of measurement errors in semiconductor Hall coefficient measurements and explored and analysed the key factors affecting the measurement results. Semiconductor samples were produced, and testing experiments on semiconductor material samples were conducted, with measurement results indicating that the measurement device had an uncertainty of less than 1%.