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半导体霍尔系数测量装置研制

Development ofsemiconductor Hall coefficient measurement equipment

  • 摘要: 霍尔系数是半导体材料和器件测试的重要参数,文章介绍了半导体霍尔系数的测量原理,基于直流霍尔法建立了霍尔系数测量装置,详细阐述了霍尔系数测量装置的组成结构和工作原理。总结了半导体霍尔系数测量误差的来源,探讨和分析了影响测量结果的关键因素。制作了半导体样品,开展了测试试验,测量结果表明该测量装置测量不确定度小于1%。

     

    Abstract: The Hall coefficient was an important parameter for testing semiconductor materials and devices. This article introduced the measurement principle of the semiconductor Hall coefficient, established a measurement device based on the direct current Hall method, and elaborated on the composition and working principle of the Hall coefficient measurement equipment. It summarised the sources of measurement errors in semiconductor Hall coefficient measurements and explored and analysed the key factors affecting the measurement results. Semiconductor samples were produced, and testing experiments on semiconductor material samples were conducted, with measurement results indicating that the measurement device had an uncertainty of less than 1%.

     

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