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垂直结构HfOx/MoS2异质结忆阻器的制备与电学性能研究

Preparation and electrical properties of vertical structure HfOx/MoS2 heterojunction memristor

  • 摘要: 利用热转移技术将机械剥离的薄层HfS2与MoS2堆叠为二维范德华异质结,经室温UV臭氧处理后形成HfOx/MoS2异质结构。使用光学显微镜、扫描电子显微镜、原子力显微镜、拉曼光谱等对HfOx/MoS2异质结构忆阻器的组分、形貌进行表征,并借助半导体参数分析仪测试忆阻器的电学性能。结果表明,随着氧化时间增加,垂直结构HfOx/MoS2异质结忆阻器的电流开关比逐渐增大,最高可达到3.2×10~9,关态电流低至3.24×10-14A,电流保持时间超过10~4s,经过100次循环后仍具有电阻开关效应。

     

    Abstract: A van der Waals heterojunction was fabricated by stacking mechanically exfoliated thin-layer HfS2 and MoS2 using a thermal transfer technique,and subsequently converted into an HfOx/MoS2 heterostructure through room-temperature UV-ozone treatment. The composition and morphology of the HfOx/MoS2 heterostructure memristor were characterized using optical microscopy,scanning electron microscopy,atomic force microscopy,and Raman spectroscopy,while its electrical properties were evaluated using a semiconductor parameter analyzer. The results indicate that with increasing oxidation time,the current on/off ratio of the vertically structured HfOx/MoS2 heterojunction memristor progressively increases,reaching a maximum value of 3.2×10~9. The off-state current is as low as 3.24×10-14A,the retention time exceeds 10~4s,and the resistive switching behavior remains stable after 100 cycles.

     

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