Abstract:
A van der Waals heterojunction was fabricated by stacking mechanically exfoliated thin-layer HfS
2 and MoS
2 using a thermal transfer technique,and subsequently converted into an HfO
x/MoS
2 heterostructure through room-temperature UV-ozone treatment. The composition and morphology of the HfO
x/MoS
2 heterostructure memristor were characterized using optical microscopy,scanning electron microscopy,atomic force microscopy,and Raman spectroscopy,while its electrical properties were evaluated using a semiconductor parameter analyzer. The results indicate that with increasing oxidation time,the current on/off ratio of the vertically structured HfO
x/MoS
2 heterojunction memristor progressively increases,reaching a maximum value of 3.2×10~9. The off-state current is as low as 3.24×10
-14A,the retention time exceeds 10~4s,and the resistive switching behavior remains stable after 100 cycles.