Abstract: Invar 36 alloy ultra-thin strips, as a key material for fine metal masks (FMM), directly determine the pixel precision and display performance of orgarlic light-emitting diode,(OLED) screens through the quality of the micro-hole structures. This paper systematically studies the influence of different processing techniques on the surface morphology, microstructure and mechanical properties of the base plate, solid plate and hole plate of invar 36 alloy ultra-thin strips. The research results show that annealing treatment will change the rolling texture and surface roughness of the invar 36 alloy ultra-thin strip surface, and these features will be inherited and highlighted in the subsequent corrosion thinning process, playing a decisive role in the final hole formation. Compared with high-temperature annealing, low-temperature stress relief annealing can effectively reduce the roughness of the base plate and achieve the best surface quality. Low-temperature stress is an ideal process for achieving uniform hole formation. Microscopically, increasing the proportion of recrystallized structure, enhancing the preferred orientation of (111) and (220) crystal planes, and increasing the content of A texture components are conducive to promoting the uniform formation of hole structures. Annealing treatment maintains the tensile strength basically unchanged while significantly reducing the yield strength and increasing the strain rate, especially low-temperature annealing performs better in improving the plasticity of the material. This paper reveals the influence mechanism of FMM hole formation quality from the perspectives of surface characteristics and microstructure, providing a theoretical basis and process optimization path for controlling material properties from the process source, suppressing etching anomalies, and improving the qualification rate of FMM products.