投审稿入口

磁控溅射非晶碳薄膜对不锈钢极薄带表面耐蚀性能的影响

Optimization of the corrosion resistance of ultra-thin stainless strips with magnetron sputtered amorphous carbon films

  • 摘要: 碳基薄膜因其优异的耐腐蚀性和化学稳定性,被广泛应用于燃料电池双极板。本文采用磁控溅射工艺在SS316L不锈钢极薄带材表面制备非晶碳(a-C)薄膜,以提升质子交换膜燃料电池(PEMFC)双极板的耐腐蚀性能。基于田口正交设计,系统分析了工作气压、溅射功率、偏压和沉积时间对碳膜性能的影响,并结合SEM与电化学测试进行表征。采用TOPSIS多属性决策方法对工艺参数进行综合优化,获得最优参数组合为:工作气压1.5 Pa、溅射功率150 W、偏压-250 V、沉积时间60 min。在该条件下,腐蚀电流密度降低至1.61×10-6A/cm2,对应腐蚀速率为0.018 mm/a。结果表明,优化的磁控溅射工艺可显著提升不锈钢极薄带双极板的耐腐蚀性能。

     

    Abstract: Carbon-based films are widely used in fuel cell bipolar plates due to their excellent corrosion resistance and chemical stability. In this paper, amorphous carbon (a-C) films were deposited on SS316L stainless steel ultra-thin strips by magnetron sputtering technology to enhance the corrosion resistance of proton exchange membrane fuel cell (PEMFC) bipolar plates. A Taguchi orthogonal design combined with SEM and electrochemical analyses was employed to evaluate the effects of working pressure, sputtering power, substrate bias, and deposition time. The optimal process parameters were determined using the TOPSIS multi-criteria decision-making method as 1.5 Pa working pressure, 150 W sputtering power,-250 V bias voltage, and 60 min deposition time. Under these conditions, the corrosion current density decreased to 1.61×10-6 A/cm2, corresponding to a corrosion rate of 0.018 mm/a. The results confirm that optimized magnetron sputtering significantly improves the corrosion resistance of stainless steel ultra-thin bipolar plates.

     

/

返回文章
返回